Diffusion and LP-CVD

  • Quartz Tubes and Boats (Wafer Carriers)
  • Vertical and Horizontal Systems
  • All Sizes (150mm, 200mm, 300mm, 450mm)
  • Polished or Opaque Quartzware
  • Sleds, Baffles, Pedestals, Dummy wafers
  • Double walled tubes
  • Bubblers and steam generators
  • Thermocouple sheaths
  • Repair of warped boats and carriers back to customer specifications